JPH0129316B2 - - Google Patents
Info
- Publication number
- JPH0129316B2 JPH0129316B2 JP58068869A JP6886983A JPH0129316B2 JP H0129316 B2 JPH0129316 B2 JP H0129316B2 JP 58068869 A JP58068869 A JP 58068869A JP 6886983 A JP6886983 A JP 6886983A JP H0129316 B2 JPH0129316 B2 JP H0129316B2
- Authority
- JP
- Japan
- Prior art keywords
- heating chamber
- frequency
- waveguide
- heating
- dimension
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Constitution Of High-Frequency Heating (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6886983A JPS59194386A (ja) | 1983-04-19 | 1983-04-19 | 高周波加熱装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6886983A JPS59194386A (ja) | 1983-04-19 | 1983-04-19 | 高周波加熱装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59194386A JPS59194386A (ja) | 1984-11-05 |
JPH0129316B2 true JPH0129316B2 (en]) | 1989-06-09 |
Family
ID=13386090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6886983A Granted JPS59194386A (ja) | 1983-04-19 | 1983-04-19 | 高周波加熱装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59194386A (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014056806A (ja) * | 2012-02-27 | 2014-03-27 | Tokyo Electron Ltd | マイクロ波加熱処理装置および処理方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5863956A (ja) * | 1981-10-14 | 1983-04-16 | Canon Inc | 原稿自動送り装置 |
-
1983
- 1983-04-19 JP JP6886983A patent/JPS59194386A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS59194386A (ja) | 1984-11-05 |
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